Focused Ion Beam (FIB) is a type of electron microscope, which uses “focused ions”to scan over the sample. This tool is similar to a Scanning Electron Microscope, however since it uses massive ions (usually Ga+) for scanning, it allows for processing of the samples due to ion-material interactions, resulting in “ion milling” based applications.
Usually Focused Ion Beam (FIB)and SEM columns are together in one platform, so called “dual-beam” or “multi-beam” systems, and hence ion and electron processing/imaging can be performed simultaneously.
Focused Ion Beam (FIB) technologies are used in multidisciplinary research and applications, for site-specific analysis, imaging, milling, deposition, micromachining and manipulation. Focused Ion beam services can be applied mostly on hard materials (metals, alloys, composites, ceramic materials, glass, multilayered devices) and rarely on soft materials (polymers, polymer composites) and biological tissues, considering the irradiation damage and artefacts caused by high energy ion bombardment on the samples.
Dual beam platforms, additionally equipped with precursor based gas injection systems, micromanipulators and chemical analysis tools (EDS) serve as multi-functional tools for (Meltem Sezen, Focused Ion Beams (FIB): Novel Methodologies and Recent Applications for Multidisciplinary Sciences” (Full Chapter); Modern Electron Microscopy, 2016, InTech; Book: Edited by Miloš Janeček; ISBN 978-953-51-4599-8)
In the Electron Microscopy and Spectroscopy Laboratory of SUNUM, a JEOL JIB 4601F MultiBeam Platform is installed with the components: Ga-FIB column, FEG-SEM column, JEOL Carbon GIS system, Omniprobe 300 Micromanipulator, Oxford X-MaxN EDS system. This configuration is able to provide:
SUNUM is highly skilled in FIB processing of a variety of materials and material systems, ranging from semiconductors to soft tissues owing to the experience and knowledge of the senior researchers and technical specialists who are leading FIB-based research globally.