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Focused Ion Beam

Focused Ion Beam (FIB) is a type of electron microscope, which uses “focused ions”to scan over the sample. This tool is similar to a Scanning Electron Microscope, however since it uses massive ions (usually Ga+) for scanning, it allows for processing of the samples due to ion-material interactions, resulting in “ion milling” based applications.

Usually Focused Ion Beam (FIB)and SEM columns are together in one platform, so called “dual-beam” or “multi-beam” systems, and hence ion and electron processing/imaging can be performed simultaneously.

Focused Ion Beam Services and Application Areas

Focused Ion Beam (FIB) technologies are used in multidisciplinary research and applications, for site-specific analysis, imaging, milling, deposition, micromachining and manipulation. Focused Ion beam services can be applied mostly on hard materials (metals, alloys, composites, ceramic materials, glass, multilayered devices) and rarely on soft materials (polymers, polymer composites) and biological tissues, considering the irradiation damage and artefacts caused by high energy ion bombardment on the samples.

Dual beam platforms, additionally equipped with precursor based gas injection systems, micromanipulators and chemical analysis tools (EDS) serve as multi-functional tools for (Meltem Sezen, Focused Ion Beams (FIB): Novel Methodologies and Recent Applications for Multidisciplinary Sciences” (Full Chapter); Modern Electron Microscopy, 2016, InTech; Book: Edited by Miloš Janeček; ISBN 978-953-51-4599-8)

  • Ultra-thin and uniform sample preparation for TEM
  • Ultra-thin and uniform specimen and lamella preparation for TEM
  • Ion beam slicing and electron beam imaging (in combination to EDS analysis on the cross-sections)
  • Site-specific micro structuring and nano structuring
  • Custom design micro structuring and nano structuring
  • Surface modification using gallium ion milling and/or carbon deposition
  • Failure analysis
  • Reverse engineering
  • 3D volumal data acquisition (nano-micron scale)

Technical Specifications and Limits of the FIB-SEM System at SUNUM

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