SUNUM has ISO 14644 Certified Class 100-1,000-10,000 (ISO 5,6,7) cleanrooms to perform micro and nanofabrication processes such as photolithography, electron beam lithography, reactive ion etching, thermal evaporation, e-beam evaporation and sputtering.

With its expert technical staff, SUNUM provides microfabrication & nanofabrication services on various materials and substrates for a wide range of application areas such as communication, health, defense, environment and energy. SUNUM also provides advanced hands-on training with state-of-the-art equipment in ISO 14644 certified cleanrooms.

Our microfabrication & nanofabrication laboratories provide custom design fabrication, infrastructure, state-of-the-art equipment and staff support necessary to enable faculty, students, academic and corporate partners to conduct competitive research in the growing number of fields that rely on microfabrication & nanofabrication.

Focused Ion Beam (FIB) is a type of electron microscope that uses “focused ions” to scan over the sample. This tool is similar to a Scanning Electron Microscope; however, since it uses massive ions, usually Ga+, for scanning, it allows processing of the samples due to ion-material interactions, resulting in “ion milling” based applications.

Usually, Focused Ion Beam (FIB) and SEM columns are integrated into one platform, so-called “dual-beam” or “multi-beam” systems, allowing ion and electron processing/imaging to be performed simultaneously.