Microfabrication & Nanofabrication (ISO 14644 Certified)

SUNUM has ISO 14644 Certified Class 100-1.000-10.000 (ISO 5,6,7) cleanrooms to perform micro and nanofabrication processes such as photolithography, electron beam lithography, reactive ion etching, thermal evaporation, e-beam evaporation and sputtering.

With its expert technical staff, SUNUM provides microfabrication & nanofabrication services on various materials and substrates covering a wide field of application areas such as communication, health, defense, environment and energy, and also provides advanced hands-on training with state-of-the-art equipment in ISO 14644 certified cleanrooms.

Our microfabrication & nanofabrication laboratories provide custom design fabrication, infrastructure, state-of-the-art equipment to use, and staff support necessary to enable faculty, students, academic and corporate partners to conduct competitive research in the growing number of fields that rely on microfabrication & nanofabrication.

Microfabrication & Nanofabrication Services

  • Fabrication of micro and nanoscale device prototypes
  • Microfluidic circuits for chemical and biological sensor applications
  • Capacitive sensor arrays for sensors and Lab-on-a-Chip applications
  • Chemical sensor arrays for flammable, explosive and poisonous elements
  • Fabrication of RF microelectromechanical circuit elements (RF-MEMS key, filter, resonator, etc.)
  • Infrared sensors/detectors
  • Micro/Nano Electromechanical Systems (MEMS/NEMS)
  • Micro/Nano antennas for THz applications
  • Inertial sensors-converters-detectors: gyroscope, accelerometer

SUNUM offers high quality micro and nano fabrication processes with an affordable price. Whether you are an academician seeking for an expert project partner in nanotechnology or an industry expert looking for a solution, we are here to collaborate! You may contact us directly through the contact link or find detailed processes from the sub categories below:

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